SAW NO2 sensors employing copper phthalocyanine as the chemical interface

Judyta Hechner; Tadeusz Wrobel

doi:10.1117/12.266702

13 February 1997 SAW NO₂ sensors employing copper phthalocyanine as the chemical interface

Judyta Hechner, Tadeusz Wrobel

Proceedings Volume 3054, Optoelectronic and Electronic Sensors II; (1997) https://doi.org/10.1117/12.266702
Event: Optoelectronic and Electronic Sensors II, 1996, Szczyrk, Poland

Abstract

This paper presents some problems concerned with SAW NO₂ sensors employing copper phthalocyanine (PcCu) as the chemical interface. The influence of piezoelectric substrate materials, crystalline structure and geometry of the PcCu coatings on the sensor sensitivity, and on temperature stability of generated frequency is discussed. The experiments were carried out for SAW delay lines on STX quartz and 128 degree(s)YX lithium niobate. Our measurements concerned PcCu coating of (alpha) and (Beta) structure. We varied the coating layer thickness from 0.1 micrometers to 1.5 micrometers and its density from 0.17 g/cm³ to 1.6 g/cm³. It was found that for the investigated range of parameters the (Beta) -PcCu layer provides several times bettor sensor sensitivity and temperature stability of SAW delay line generation frequency than (alpha) -PcCu layer of the same mass. This is valid for both used substrates.

Citation Download Citation

Judyta Hechner and Tadeusz Wrobel "SAW NO₂ sensors employing copper phthalocyanine as the chemical interface", Proc. SPIE 3054, Optoelectronic and Electronic Sensors II, (13 February 1997); https://doi.org/10.1117/12.266702

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