MEMS CAD and foundries: where are we going?

Jean Michel Karam

doi:10.1117/12.284520

5 September 1997 MEMS CAD and foundries: where are we going?

Jean Michel Karam

Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284520
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

Besides foundry facilities, computer-aided design tools are also required to potentially move integrated MEMS from research prototypes to an industrial market. This paper presents the different available facilities for low cost collective manufacturing of MEMS and reports on the various significant developments of MEMS design environments. Making the inventory of these activities illustrates how the industry is answering the question of will MEMS technology delivers.

Citation Download Citation

Jean Michel Karam "MEMS CAD and foundries: where are we going?", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284520

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