Microair turbine by micromachining of silicon

C. R. Jalwania; Ranvir Singh; Vinoy K. Jain

doi:10.1117/12.305559

16 April 1998 Microair turbine by micromachining of silicon

C. R. Jalwania, Ranvir Singh, Vinoy K. Jain

Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305559
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India

Abstract

Micro-mechanical components become the basic need to the construction of micro-mechanical systems. The development of silicon micromachining and increasing diversity and sophistication of anisotropic and isotropic etching techniques make micro-mechanical structures and devices feasible in forms and scales that could not have been achieved by conventional machining. In this work a new and simple technology for the fabrication of micro air turbine by Bulk Silicon micromachining is presented. A micro air turbine with a radius of 2000 micrometers and thickness of 60 micrometers has been realized out of discrete, silicon rotor, stator and operated at speed of 40,000 rpm. Limitations to further size reduction are not the photolithographic or etching processes, but the difficulty in handling such small components without loss or damage. Moreover, the use of silicon processing technology makes possible the fabrication and integration of sensors, actuators and control circuitry on the same chip.

Citation Download Citation

C. R. Jalwania, Ranvir Singh, and Vinoy K. Jain "Microair turbine by micromachining of silicon", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); https://doi.org/10.1117/12.305559

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