Laser modulated scattering as a nondestructive evaluation tool for optical surfaces and thin film coatings

Zhouling Wu; Michael D. Feit; Mark R. Kozlowski; Alexander M. Rubenchik; Lynn Matthew Sheehan

doi:10.1117/12.344422

7 April 1999 Laser modulated scattering as a nondestructive evaluation tool for optical surfaces and thin film coatings

Zhouling Wu, Michael D. Feit, Mark R. Kozlowski, Alexander M. Rubenchik, Lynn Matthew Sheehan

Proceedings Volume 3578, Laser-Induced Damage in Optical Materials: 1998; (1999) https://doi.org/10.1117/12.344422
Event: Laser-Induced Damage in Optical Materials: 1998, 1998, Boulder, CO, United States

Abstract

Laser modulated scattering (LMS) is introduced as a non- destruction evaluation tool for defect inspection and characterization of optical surface sand thin film coatings. It allows simultaneous measurement of the DC and AC scattering signals of a probe laser beam from an optical surface. by comparison between the DC and AC scattering signals, one can differentiate absorptive defects from non- absorptive ones. This paper describes the principle of the LMS technique and the experimental setup, and illustrates examples on using LMS as a tool for nondestructive evaluation of high quality optics.

Citation Download Citation

Zhouling Wu, Michael D. Feit, Mark R. Kozlowski, Alexander M. Rubenchik, and Lynn Matthew Sheehan "Laser modulated scattering as a nondestructive evaluation tool for optical surfaces and thin film coatings", Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); https://doi.org/10.1117/12.344422

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