Effect of mask critical dimension error for subquarter-micron contact hole

Hung-Eil Kim; Jun-Sung Chun; Stanley Barnett; James Shih

doi:10.1117/12.354400

26 July 1999 Effect of mask critical dimension error for subquarter-micron contact hole

Hung-Eil Kim, Jun-Sung Chun, Stanley Barnett, James Shih

Proceedings Volume 3679, Optical Microlithography XII; (1999) https://doi.org/10.1117/12.354400
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

The effect of mask critical dimension (CD) error for binary mask and attenuated phase shift mask (PSM) are investigated by simulation and experimental based data. For the large features, mask error factor (MEF) is approximately unit. But as the CD is closed to the resolution limit, the MEF value is rapidly increased. The MEF was dependent on the contact density. For example, dense contact has larger MEF value than isolated contact. Attenuated PSM has smaller MEF value comparing with binary mask because it is applied the positive mask bias in order to reduce the sidelobe printing. The sensitivity of mask CD error for NA and sigma variation was different from the contact density. For the isolated contact, MEF value was almost independent on the sigma value. However, the MEF was improved by high NA lines at the resolution limits both for the isolated and for the dense contact. According to these data, the mask CD control budget for the sub-quarter micron contact was considered.

Citation Download Citation

Hung-Eil Kim, Jun-Sung Chun, Stanley Barnett, and James Shih "Effect of mask critical dimension error for subquarter-micron contact hole", Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); https://doi.org/10.1117/12.354400

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available