Development of pellicle for ArF excimer laser

Shigeto Shigematsu; Masahiro Kondo; Hiroaki Nakagawa

doi:10.1117/12.360211

25 August 1999 Development of pellicle for ArF excimer laser

Shigeto Shigematsu, Masahiro Kondo, Hiroaki Nakagawa

Proceedings Volume 3748, Photomask and X-Ray Mask Technology VI; (1999) https://doi.org/10.1117/12.360211
Event: Photomask and X-Ray Mask Technology VI, 1999, Yokohama, Japan

Abstract

We tested the membrane longevity of the fluoropolymer using narrow-banded ArF Excimer Laser with spectro-width 0.8 pm. We compared the result with that of using free-run Laser which is not narrow-banded with spectro-width 450 pm. We obtained the following findings: (1) Under the air environment, the membrane longevity improves about 4 times by using narrow- banded Laser compared to free-run Laser. A transmission deterioration due to creation of the light absorption substances on the membrane is not occurred under the air environment either by free-run Laser or by narrow-banded Laser. (2) Under the nitrogen environment, creation of the light absorption substances is suppressed by using narrow- banded Laser, and this leads to the membrane longevity improvement. However, as compared to under the air environment, the membrane longevity is shortened by approximately 10 times.

Citation Download Citation

Shigeto Shigematsu, Masahiro Kondo, and Hiroaki Nakagawa "Development of pellicle for ArF excimer laser", Proc. SPIE 3748, Photomask and X-Ray Mask Technology VI, (25 August 1999); https://doi.org/10.1117/12.360211

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