Ceramics thin film formation for micromechanism and electronic device by ArF laser ablation

Masayuki Ikeda; Takashi Morino; Yoshimi Takahashi; Hayato Onodera

doi:10.1117/12.364237

20 September 1999 Ceramics thin film formation for micromechanism and electronic device by ArF laser ablation

Masayuki Ikeda, Takashi Morino, Yoshimi Takahashi, Hayato Onodera

Proceedings Volume 3822, Computer-Controlled Microshaping; (1999) https://doi.org/10.1117/12.364237
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

The film formation thinner than a few ten nano-meters, called ultra-thin films, has been the indispensable technology to develop various electronic devices. This paper describes the ultra-thin film forming process and properties of an Al₂O₃ film deposited mainly. The films of a few nano-meter thickness and nearly mono-atomic layer were formed by the excimer laser ablation. The ceramics film and multi-layer film were deposited on a Si wafer and a plate glass substrate at room temperature in the extremely high vacuum atmosphere. Surface roughness of the film was less than 1 nm and no defects of small holes and micro-cracks were found in the film of 2.6 nm thickness by measuring tunneling current at liquid N₂ temperature.

Citation Download Citation

Masayuki Ikeda, Takashi Morino, Yoshimi Takahashi, and Hayato Onodera "Ceramics thin film formation for micromechanism and electronic device by ArF laser ablation", Proc. SPIE 3822, Computer-Controlled Microshaping, (20 September 1999); https://doi.org/10.1117/12.364237

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available