Critical comparison of design- and analysis-of-experiments methods for MEMS metamodel generation

Selden B. Crary; Peter Cousseau; Eva H. Mok; David M. Woodcock; Philippe Renaud

doi:10.1117/12.360486

31 August 1999 Critical comparison of design- and analysis-of-experiments methods for MEMS metamodel generation

Selden B. Crary, Peter Cousseau, Eva H. Mok, David M. Woodcock, Philippe Renaud

Proceedings Volume 3876, Micromachined Devices and Components V; (1999) https://doi.org/10.1117/12.360486
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

We use finite-element simulations of a micromachined gas-flow sensor as an example to demonstrate and critically compare various design- and analysis-of-experiments methods for the generation of simple, surrogate functional approximations. Such approximations can be used to greatly reduce computational expense in MEMS design and optimization. The following design methods are included in our study: factorial, alphabetic (A, D, G, I, and S-optimal), maximin, latin hypercube, central composite, and a method using a new program from the University of Michigan named IMSET^TM. Analyses include both a parametric method (ordinary least squares or OLS) and a non-parametric method (best linear unbiased predictor or BLUP).

Citation Download Citation

Selden B. Crary, Peter Cousseau, Eva H. Mok, David M. Woodcock, and Philippe Renaud "Critical comparison of design- and analysis-of-experiments methods for MEMS metamodel generation", Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); https://doi.org/10.1117/12.360486

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