Time-of-flight mass spectrometric studies on laser ablation dynamics of graphite: correlation to diamondlike carbon film deposition

Fumio Kokai; Kazuhiro Yamamoto; Yoshinori Koga

doi:10.1117/12.376965

1 February 2000 Time-of-flight mass spectrometric studies on laser ablation dynamics of graphite: correlation to diamondlike carbon film deposition

Fumio Kokai, Kazuhiro Yamamoto, Yoshinori Koga

Author Affiliations +

Proceedings Volume 3885, High-Power Laser Ablation II; (2000) https://doi.org/10.1117/12.376965
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan

Abstract

Time-of-flight mass spectrometry has been used to probe neutral and positive ionic species produced by laser ablation of a graphite target at 266, 355, 532, and 1064 nm. The arrival time distributions of major carbon species (C₃, C⁺, and C₃⁺) at a deposition substrate, 45 mm from a target, were fitted with a thermal Maxwell-Boltzmann (MB) distribution or a shifted MB distribution with a narrower width. The characteristics of laser ablation with shorter-wavelength laser light are the formation of atomic carbon species with high kinetic energies and the promotion of their ionization. We discuss the generation process of C⁺ and the formation of a tetrahedral amorphous carbon film with a high fraction of sp³ bonded carbon atoms.

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Fumio Kokai, Kazuhiro Yamamoto, and Yoshinori Koga "Time-of-flight mass spectrometric studies on laser ablation dynamics of graphite: correlation to diamondlike carbon film deposition", Proc. SPIE 3885, High-Power Laser Ablation II, (1 February 2000); https://doi.org/10.1117/12.376965

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