Solid-state NMR characterization of resist formulations for 193-nm lithography: chain dynamics and length scale of mixing

Peter A. Mirau; Sharon A. Heffner; Ilya L. Rushkin; Francis M. Houlihan

doi:10.1117/12.388370

23 June 2000 Solid-state NMR characterization of resist formulations for 193-nm lithography: chain dynamics and length scale of mixing

Peter A. Mirau, Sharon A. Heffner, Ilya L. Rushkin, Francis M. Houlihan

Author Affiliations +

Proceedings Volume 3999, Advances in Resist Technology and Processing XVII; (2000) https://doi.org/10.1117/12.388370
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

Solid-state carbon NMR with cross polarization and magic-angle spinning has been used to study the chain dynamics and length scale of mixing in resist formulations of norbornene-maleic anhydride copolymers for 193 nm lithography. Two-dimensional wide line separation NMR has been used to measure the chain dynamics via the indirectly detected proton line shapes. The results show that the polymers do not experience large amplitude atomic fluctuations at the high temperatures (155 degrees Celsius) currently used for resist processing. Additional NMR experiments using proton spin diffusion demonstrate that the polymers and dissolution inhibitors are mixed on a molecular length scale.

Citation Download Citation

Peter A. Mirau, Sharon A. Heffner, Ilya L. Rushkin, and Francis M. Houlihan "Solid-state NMR characterization of resist formulations for 193-nm lithography: chain dynamics and length scale of mixing", Proc. SPIE 3999, Advances in Resist Technology and Processing XVII, (23 June 2000); https://doi.org/10.1117/12.388370

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available