Miniature mass spectrometer for chemical and biological sensing

Steve Taylor; Balasingam Srigengan; J. R. Gibson; Dick Tindall; Richard R. A. Syms; Tom Tate; Munir M. Ahmad

doi:10.1117/12.394074

28 July 2000 Miniature mass spectrometer for chemical and biological sensing

Steve Taylor, Balasingam Srigengan, J. R. Gibson, Dick Tindall, Richard R. A. Syms, Tom Tate, Munir M. Ahmad

Proceedings Volume 4036, Chemical and Biological Sensing; (2000) https://doi.org/10.1117/12.394074
Event: AeroSense 2000, 2000, Orlando, FL, United States

Abstract

An experimental study has been carried out using a Miniature Quadrupole Mass Spectrometer (MicroQuad) for gas analysis. Conventional quadrupole rods have been replaced with a micromachined mass filter made from silicon with Au metallized specially drawn glass fibers of length 30 mm and diameter 0.5 mm. A standard hot filament ion source and both Faraday detection and a channel electron multiplier have been used. The effect of ion focus voltage has also been modeled by SIMION simulation. Conventional electronics were adapted to run at 6 to 8 MHz and mass spectra in the range 0 - 50 a.m.u. The results indicate a good valley separation between O, OH, H₂O and Ar²⁺ and a best resolution at 10% peak height of 0.9 a.m.u. at mass 40 with the multiplier. Application of a static magnetic field transversely to the body of the mass filter is shown to improve resolution howbeit at the expense of ion transmission through the filter.

Citation Download Citation

Steve Taylor, Balasingam Srigengan, J. R. Gibson, Dick Tindall, Richard R. A. Syms, Tom Tate, and Munir M. Ahmad "Miniature mass spectrometer for chemical and biological sensing", Proc. SPIE 4036, Chemical and Biological Sensing, (28 July 2000); https://doi.org/10.1117/12.394074

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