Laser-diode-based pseudo-heterodyne interferometer for online process control of wire bonders

Andrew C. Lewin; F. Ritter; Georg Siegmund

doi:10.1117/12.386725

22 May 2000 Laser-diode-based pseudo-heterodyne interferometer for online process control of wire bonders

Andrew C. Lewin, F. Ritter, Georg Siegmund

Proceedings Volume 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2000) https://doi.org/10.1117/12.386725
Event: 4th International Conference on Vibration Measurement by Laser Techniques, 2000, Ancona, Italy

Abstract

As part of a government funded multidisciplinary project, a sensor has been developed to allow the measurement of the ultrasonic amplitude at the tip of the bonding too. A laser interferometer has been designed with a fiber coupled miniature measurement head which can be mounted on the rotating bond head. A modulated visible diode laser is employed to generate a direction-sensitive Doppler signal according to the pseudo-heterodyne principle.

Citation Download Citation

Andrew C. Lewin, F. Ritter, and Georg Siegmund "Laser-diode-based pseudo-heterodyne interferometer for online process control of wire bonders", Proc. SPIE 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2000); https://doi.org/10.1117/12.386725

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