Development of the enhanced concurrent in-line inspection system for CO2 laser drilling machine

Hideaki Nagatoshi; Kazuhide Isaji; Tsutomu Sugiyama; Hidehiko Karasaki; Makoto Kato

doi:10.1117/12.405682

6 November 2000 Development of the enhanced concurrent in-line inspection system for CO₂ laser drilling machine

Hideaki Nagatoshi, Kazuhide Isaji, Tsutomu Sugiyama, Hidehiko Karasaki, Makoto Kato

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405682
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

The performance of the concurrent in-line inspection system in CO₂ laser drilling process has improved by the defect pattern estimation algorithm. The optical detection principle of the system is based on the relationship between the reflected laser intensity from the bottom copper foil in via-hole and the area size of the exposed copper surface. The principle and the advantage of the enhance concurrent inspection system was described. Using the improved concurrent inspection system, the etched hole diameter and defect of PWB can be examined. This function has a capability to substitute AOI function. As a result, reliability and throughput in PWB drilling process has been improved.

Citation Download Citation

Hideaki Nagatoshi, Kazuhide Isaji, Tsutomu Sugiyama, Hidehiko Karasaki, and Makoto Kato "Development of the enhanced concurrent in-line inspection system for CO₂ laser drilling machine", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405682

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