Influence of laser fluence on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed-laser deposition

Jian Ping Zhao; Z. Y. Chen; T. Yano; Toshihiko Ooie; Masafumi Yoneda; J. Sakakibara

doi:10.1117/12.405720

6 November 2000 Influence of laser fluence on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed-laser deposition

Jian Ping Zhao, Z. Y. Chen, T. Yano, Toshihiko Ooie, Masafumi Yoneda, J. Sakakibara

Author Affiliations +

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405720
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

Carbon nitride films were deposited by pulsed Nd:YAG laser ablation of graphite with assistance of nitrogen ion beam bombardment. The nitrogen to carbon (N/C) atomic ratio, surface morphology and bonding state of the deposited carbon nitride films were characterized by X-ray photoelectron spectroscopy (XPS), Fourier transform infrared (FTIR) spectroscopy and atomic force microscopy (AFM). The influence of laser fluence on the synthesis of carbon nitride films was investigated. The N/C atomic ratio of the carbon nitride films can reach the maximum at the highest laser fluence. XPS and FTIR analyses indicated that the bonding state between the carbon and nitrogen in the deposited films was influenced by the laser fluence during deposition. The carbon-nitrogen bonding of C-N, C=N together with very few CequalsVN were found in the films. Results indicated that the laser fluence also had critical effect on the surface morphologies of the carbon nitride films.

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Jian Ping Zhao, Z. Y. Chen, T. Yano, Toshihiko Ooie, Masafumi Yoneda, and J. Sakakibara "Influence of laser fluence on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed-laser deposition", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405720

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