Paper
6 November 2000 Laser microcaving of steel with solid state lasers
Tobias Abeln, Joachim Radtke, Michael Weikert, Friedrich Dausinger
Author Affiliations +
Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405714
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan
Abstract
In this contribution a technique will be presented using a cw solid-state laser for high precision micro-machining of steel which avoids recast layers and burr formation. This processing technique gets rid of the detrimental melt production by using oxidizing for material removal. The produced oxide chips can be removed from the structure completely by compressed air. No processing chemicals are necessary like in etching techniques. Other advantages of this method are sharp edges without any burrs, smooth bottoms in the structure ground and a small heat affected zone compared to material removal by melting.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tobias Abeln, Joachim Radtke, Michael Weikert, and Friedrich Dausinger "Laser microcaving of steel with solid state lasers", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405714
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KEYWORDS
Oxides

Solid state lasers

Laser ablation

Laser processing

Continuous wave operation

Micromachining

Surface roughness

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