Nonlinear dynamic behavior of electrostatically actuated devices

Yi-mang Chou; Weileun Fang

doi:10.1117/12.395610

11 August 2000 Nonlinear dynamic behavior of electrostatically actuated devices

Yi-mang Chou, Weileun Fang

Proceedings Volume 4175, Materials and Device Characterization in Micromachining III; (2000) https://doi.org/10.1117/12.395610
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The contribution of this paper is to improve the analytical model of the dynamic system for an electrostatically driven device. Therefore, the material properties such as Young's modulus will be determined more accurately; furthermore, the dynamic behavior of electrostatically actuated devices can be predicted more precisely.

Citation Download Citation

Yi-mang Chou and Weileun Fang "Nonlinear dynamic behavior of electrostatically actuated devices", Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); https://doi.org/10.1117/12.395610

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