Efficiency of secondary-electron detectors

Boris N. Vasichev; A. A. Melnikov; O. D. Potapkin

doi:10.1117/12.394158

2 August 2000 Efficiency of secondary-electron detectors

Boris N. Vasichev, A. A. Melnikov, O. D. Potapkin

Proceedings Volume 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics; (2000) https://doi.org/10.1117/12.394158
Event: Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, 1999, Moscow, Russian Federation

Abstract

The collection coefficient for secondary electrons is calculated for a two-detector system. The coefficient is an important parameter that determines the accuracy of line-width measurements in electron beam plants. Calculations of the chamber electrostatic field for various boundary conditions are presented. Trajectories of secondary electrons are found.

Citation Download Citation

Boris N. Vasichev, A. A. Melnikov, and O. D. Potapkin "Efficiency of secondary-electron detectors", Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); https://doi.org/10.1117/12.394158

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