Measurement of high-power laser resonator mirror's misalignment using PSD

Lingxiang Zhang; Lei Fu; Hongmin Shi; Yaodong Lu

doi:10.1117/12.403911

10 October 2000 Measurement of high-power laser resonator mirror's misalignment using PSD

Lingxiang Zhang, Lei Fu, Hongmin Shi, Yaodong Lu

Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403911
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

PSD is the abbreviation of position sensitive detector, which can transform the light spot position on sensitive surface into photocurrent. Based on the structure, there are on-dimension PSD and two-dimension PSD. Recently PSD is mainly used in the position sensor based on the principle of optical triangulation. We use it as sensor in the control system of high-power laser resonator mirrors' misalignment in order to improve the quality of laser pattern. In this paper, we discuss the system, the theoretical model, the angle magnification technology, the control circuit of sensor signal, and the control executive part in details. At last, we introduce the experimental result.

Citation Download Citation

Lingxiang Zhang, Lei Fu, Hongmin Shi, and Yaodong Lu "Measurement of high-power laser resonator mirror's misalignment using PSD", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403911

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