Modal characteristics of quartz tuning-fork angular rate microsensor by means of FEM

Ying Wang; Yunan Sun; BingKun Qin; Ping Yin

doi:10.1117/12.403906

10 October 2000 Modal characteristics of quartz tuning-fork angular rate microsensor by means of FEM

Ying Wang, Yunan Sun, BingKun Qin, Ping Yin

Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403906
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

Quartz tuning-fork angular rate sensor (gyroscope) is a new kind of vibratory gyroscope which has a big market. The solid model of the quartz tuning fork is established and finite element method is used in studying its modal characteristics in this paper. The influence of the gyroscope structural dimension on the resonant frequency and structural modes is investigated, which offers reliable basis for the structure design of the micro gyroscope. Software Ansys5.6 is used in this work.

Citation Download Citation

Ying Wang, Yunan Sun, BingKun Qin, and Ping Yin "Modal characteristics of quartz tuning-fork angular rate microsensor by means of FEM", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403906

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