Optical probe using differential confocal technique for surface profile

Fusheng Wang; Jiubin Tan; Weiqian Zhao

doi:10.1117/12.403872

10 October 2000 Optical probe using differential confocal technique for surface profile

Fusheng Wang, Jiubin Tan, Weiqian Zhao

Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403872
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

A non-contact optical probe for surface profiling with up to 2nm position resolution over 100micrometers measurement range has been developed, which includes a confocal light path for non-contact position and a capacitance sensor for Z axis displacement measurement. The principle of the optical probe is based on differential confocal technique. The differential light- intensity distribution depends on the confocal axial response (or depth discrimination) properties. Using the diffraction theory, the mathematical analysis of the method has been performed. Validity of the mathematical theory analysis of the differential confocal technique is experimentally verified.

Citation Download Citation

Fusheng Wang, Jiubin Tan, and Weiqian Zhao "Optical probe using differential confocal technique for surface profile", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403872

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