Micromachined submillimeter-wave frequency multipliers

James G. Partridge; Steven R. Davies

doi:10.1117/12.418755

16 March 2001 Micromachined submillimeter-wave frequency multipliers

James G. Partridge, Steven R. Davies

Proceedings Volume 4236, Smart Electronics and MEMS II; (2001) https://doi.org/10.1117/12.418755
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

The work described here uses microfabrication methods to integrate semiconductor devices with micromachined waveguide cavities to form submillimetre-wave frequency multipliers. Processing schemes involve both planar and three-dimensional lithography, using conventional photoresist and epoxy based SU8. Two approaches have been used. In the first, micromachining methods were employed to fabricate an integrated 270-810GHz frequency tripler. This includes a varactor diode contacted via an electroplated whisker, which is integrated with a stripline filter and waveguide probe. In the second approach, a specially designed Schottky diode chip incorporating the stripline filter/bias circuit is mounted in a micromachined, waveguide circuit block to form a 135-270GHz frequency doubler.

Citation Download Citation

James G. Partridge and Steven R. Davies "Micromachined submillimeter-wave frequency multipliers", Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); https://doi.org/10.1117/12.418755

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available