New instrument for measuring mechanical compliance of microsystems

Bingfeng Ju; Kuo Kang Liu; Shih-Fu Ling

doi:10.1117/12.429581

13 June 2001 New instrument for measuring mechanical compliance of microsystems

Bingfeng Ju, Kuo Kang Liu, Shih-Fu Ling

Proceedings Volume 4317, Second International Conference on Experimental Mechanics; (2001) https://doi.org/10.1117/12.429581
Event: Second International Conference on Experimental Mechanics, 2000, Singapore, Singapore

Abstract

A new ultra-precision instrument is designed and fabricated for measuring the mechanical compliance of Micro-systems. The apparatus was based around an inverted optical microscope. Attached to the microscope stage is a compliant mechanism activated by a PZT actuator incorporated with a micro-stepper DC motor capable of generating discrete micro- steps of less than 1 nm and a traveling distance up to 10 mm. A measuring system with a force resolution better than 10 (mu) N and a maximum force capability of 0.1N will be attached to the stage. In its final form the tester have a force and displacement resolution of 10 (mu) N and 1 nm, respectively. For viewing the micro-system under deformation, a high-resolution CCD camera connected to the microscope allowed to acquiring the images. The preliminary measured compliance of a well-defined micro-system is presented to be reasonable.

Citation Download Citation

Bingfeng Ju, Kuo Kang Liu, and Shih-Fu Ling "New instrument for measuring mechanical compliance of microsystems", Proc. SPIE 4317, Second International Conference on Experimental Mechanics, (13 June 2001); https://doi.org/10.1117/12.429581

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