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16 August 2001 MEMS for high-frequency applications
Jung-Chih Chiao
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Proceedings Volume 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS; (2001) https://doi.org/10.1117/12.436599
Event: SPIE's 8th Annual International Symposium on Smart Structures and Materials, 2001, Newport Beach, CA, United States
Abstract
In this paper, we reviewed some of the microelectromechanical system (MEMS) research efforts for high frequency applications. The efforts can generally be divided into two areas: planar reconfigurable transceivers and phased arrays using MEMS devices. For the planar transceivers, the interest is in demonstration of RF MEMS devices with a focus on integration issues including architectures and fabrication. Our goal is to establish building blocks for compact, smart transceivers that have beam forming and tuning functionality. For phased-array applications, system architectures were demonstrated for quasi-optical systems and phased arrays. The purpose is to demonstrate beam forming and steering functionality using MEMS devices instead of expensive phase shifters.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Jung-Chih Chiao "MEMS for high-frequency applications", Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); https://doi.org/10.1117/12.436599
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Cited by 2 patents.
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KEYWORDS
Microelectromechanical systems
Switches
Antennas
Metals
Phase shifts
Transceivers
Electronics
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