Thermal properties of COMA materials

Ilya L. Rushkin; Bernard T. Beauchemin Jr.; Ognian N. Dimov; Thomas Kocab; Arturo N. Medina; Thomas R. Sarubbi; Murrae J. Bowden

doi:10.1117/12.436841

24 August 2001 Thermal properties of COMA materials

Ilya L. Rushkin, Bernard T. Beauchemin Jr., Ognian N. Dimov, Thomas Kocab, Arturo N. Medina, Thomas R. Sarubbi, Murrae J. Bowden

Author Affiliations +

Proceedings Volume 4345, Advances in Resist Technology and Processing XVIII; (2001) https://doi.org/10.1117/12.436841
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

Glass transition measurements of cycloolefin/maleic anhydride (COMA) resist resins are complicated by the fact that their glass transitions and the thermal decomposition of their imaging groups often occur over the same temperature range. In order to gain insight into the Tg ranges of these materials, a series of model non-imaging COMA polymers was synthesized and evaluated by DSC. Among the materials thus examined were copolymers of substituted norbornenes with maleic anhydride, copolymers of nobornene with maleic anhydride and cyclohexyl acrylate, and copolymers of vinyl ethers with maleic anhydride. The effects of cholate additives on thermal properties of COMA polymers were also examined.

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Ilya L. Rushkin, Bernard T. Beauchemin Jr., Ognian N. Dimov, Thomas Kocab, Arturo N. Medina, Thomas R. Sarubbi, and Murrae J. Bowden "Thermal properties of COMA materials", Proc. SPIE 4345, Advances in Resist Technology and Processing XVIII, (24 August 2001); https://doi.org/10.1117/12.436841

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