Development of a laser micromachining toolbox and its application to the production of 3D microstructures

Jako Greuters; Nadeem Hasan Rizvi

doi:10.1117/12.425325

30 April 2001 Development of a laser micromachining toolbox and its application to the production of 3D microstructures

Jako Greuters, Nadeem Hasan Rizvi

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425325
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

As laser micromachining has developed in recent years, there has emerged a need for the simplification of the process to produce MEMS structures where the stages of manufacture do not require an in-depth knowledge of laser micromachining techniques. This paper describes the initial stages of such an approach - the laser micromachining 'toolbox' - which enable the optimum machining choices to be made from various design requirements. Some of the elements of the toolbox are introduced and quantified in the particular case of excimer laser micromachining. These features are then used to produce a 3D microstructure to demonstrate the capabilities of this approach. Future developments in this area are discussed.

Citation Download Citation

Jako Greuters and Nadeem Hasan Rizvi "Development of a laser micromachining toolbox and its application to the production of 3D microstructures", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425325

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