Design methods for microelectromechanical bandpass filters

Dimitri Galayko; Andreas Kaiser

doi:10.1117/12.425373

5 April 2001 Design methods for microelectromechanical bandpass filters

Dimitri Galayko, Andreas Kaiser

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425373
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

A design method for high-order electro-mechanical filters that makes use of the equivalence between lumped-parameters electrical and mechanical systems is presented. Conditions for existence of the equivalent mechanical system are derived, and electro-statical coupling of micro-mechanical resonators is introduced. The application to the simulation and design of a bandpass filter with finite transmission zeros implemented in a thick-layer epi-poly silicon micro-machining technology is shown.

Citation Download Citation

Dimitri Galayko and Andreas Kaiser "Design methods for microelectromechanical bandpass filters", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425373

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