Light-induced parametric amplification in MEMS oscillators

Maxim Zalalutdinov; Anatoli Olkhovets; Alan T. Zehnder; Bojan Ilic; D. Czaplewcki; Jeevak M. Parpia; Harold G. Craighead

doi:10.1117/12.425400

5 April 2001 Light-induced parametric amplification in MEMS oscillators

Maxim Zalalutdinov, Anatoli Olkhovets, Alan T. Zehnder, Bojan Ilic, D. Czaplewcki, Jeevak M. Parpia, Harold G. Craighead

Author Affiliations +

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425400
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

Micromechanical oscillators in the radio frequency (rf) range were fabricated in the form of silicon discs supported by a SiO₂ pillar at the disc center. Effective spring constant of this oscillator can be controlled within the range (Delta) f/f approximately 10^-4 by a low power laser beam, (P_laser approximately 100 (mu) W), focused at the periphery of the disc. Parametric amplification of the disc's vibrations was achieved through a double frequency modulation of the laser power. An amplitude gain of up to 30 was demonstrated, with further increase limited by non-linear behavior and self-generation. Phase dependence, inherent in degenerate parametric amplification, was also observed. Self- modulation of the CW laser beam (P_laser approximately 100 (mu) W) provided by placing the disc oscillator into an interference pattern setup can lead to parametric self- excitation.

Citation Download Citation

Maxim Zalalutdinov, Anatoli Olkhovets, Alan T. Zehnder, Bojan Ilic, D. Czaplewcki, Jeevak M. Parpia, and Harold G. Craighead "Light-induced parametric amplification in MEMS oscillators", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425400

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