Top-down design flow for MOEMS

Gunar Lorenz; Arthur S. Morris III; Issam Lakkis

doi:10.1117/12.425351

5 April 2001 Top-down design flow for MOEMS

Gunar Lorenz, Arthur S. Morris III, Issam Lakkis

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425351
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

As MOEMS (Micro-Opto-Electro-Mechanical Systems) transition from laboratory curiosities to production products inserted into telecommunication systems, a top down design flow is necessary to minimize time-to-market. We present a structured- custom approach for MOEMS design based on the concept of using parameterized behavioral models as a means to improve and speed up the design process. This approach enables a user to quickly explore a larger design space on the interaction of the behavioral models with their surrounding system. Once the simulation is completed to the designer's satisfaction, a device layout can be output for FEM verification on critical areas or to generate the masks for fabrication.

Citation Download Citation

Gunar Lorenz, Arthur S. Morris III, and Issam Lakkis "Top-down design flow for MOEMS", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425351

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