Analysis of the structure of a high-g-force MEMS accelerometer

Ping Song; Kejie Li; Gengchen Shi

doi:10.1117/12.440208

14 September 2001 Analysis of the structure of a high-g-force MEMS accelerometer

Ping Song, Kejie Li, Gengchen Shi

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440208
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

In this paper, several micro-mechanical structures of high g-force MEMS accelerometers will be analyzed; their characteristics will be discussed. Finally, a structure with new features will be given.

Citation Download Citation

Ping Song, Kejie Li, and Gengchen Shi "Analysis of the structure of a high-g-force MEMS accelerometer", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440208

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