Effective dielectric-constant measurement for micromachined transmission line with multiline method

Shuzhen You; Yanling Shi; Zongsheng Lai; Ziqiang Zhu

doi:10.1117/12.440143

14 September 2001 Effective dielectric-constant measurement for micromachined transmission line with multiline method

Shuzhen You, Yanling Shi, Zongsheng Lai, Ziqiang Zhu

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440143
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

An application of multiline method in measuring the effective dielectric constant of micromachiend microwave transmission lines is presented in this paper. This multiline method does not need a network analyzer calibration. It produces the effective dielectric constant of the structure using propagation constant measurements. For comparison, we performed measurements in micromachined microwave transmission lines both before and after they were suspended. The measurement result show that at high frequency the real part of the effective dielectric constant of the structure is about 6 before suspending and is about 1 after suspending. The imaginary part of the measured effective dielectric constant of the structure is about zero because the transmissions line is very short.

Citation Download Citation

Shuzhen You, Yanling Shi, Zongsheng Lai, and Ziqiang Zhu "Effective dielectric-constant measurement for micromachined transmission line with multiline method", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440143

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