Light addressable potentiometric sensor with an array of sensing regions

Weiguo Liang; JingHong Han; Hong Zhang; Deyong Chen

doi:10.1117/12.440239

14 September 2001 Light addressable potentiometric sensor with an array of sensing regions

Weiguo Liang, JingHong Han, Hong Zhang, Deyong Chen

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440239
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

This paper describes the mechanism of light addressable poteniometric sensors (LAPS) from the viewpoints of Semiconductor Physics, and introduces the fabrication of a multi-parameter LAPS chip. The MEMS technology is applied to produce a matrix of sensing regions on the wafer. By doing that, the cross talk among these regions is reduced, and the precision of the LAPS is increased. An IR-LED matrix is used as the light source, and the flow-injection method is used to input samples. The sensor system is compact and highly integrated. The measure and control system is composed of a personal computer, a lock-in amplifier, a potentiostat, a singlechip system, and an addressing circuit. Some experiments have been done with this device. The results show that this device is very promising for practical use.

Citation Download Citation

Weiguo Liang, JingHong Han, Hong Zhang, and Deyong Chen "Light addressable potentiometric sensor with an array of sensing regions", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440239

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