Novel four-beam piezoresistive accelerometer

Zhaohua Zhang; Litian Liu; Mingsheng Wen

doi:10.1117/12.440210

14 September 2001 Novel four-beam piezoresistive accelerometer

Zhaohua Zhang, Litian Liu, Mingsheng Wen

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440210
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

Piezo resistive silicon accelerometers have many excellent performance characteristics such as high sensitivity, high reliability and low cost. In this paper, a novel Piezo resistive silicon accelerometer is presented. This accelerometer has four beams. Such structure can not only decrease cross-axis sensitivity, but also utilize the full of strain caused by acceleration. Using Finite-Element Analysis (FEA) software, we did strain simulation in order to analyze the stress distribution. The result of finite- element method simulation accorded with theory analysis very much. Layout design and fabrication process result of finite-element method simulation accorded with theory analysis very much. Layout design and fabrication process of this accelerometer are presented in this paper, also, During fabrication process, a novel double side alignment was introduced. We also changed the release process of the sensor proof masses. This can make reject rate become very small.

Citation Download Citation

Zhaohua Zhang, Litian Liu, and Mingsheng Wen "Novel four-beam piezoresistive accelerometer", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440210

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