Surface-micromachined miniature rf switch

Fangmin Guo; Zongsheng Lai; Ziqiang Zhu; Zhong Fan; Yongfu Long; Gen Qing Yang; Xiaohong Ge; Siqin Chen; Jianfang Xie

doi:10.1117/12.440198

14 September 2001 Surface-micromachined miniature rf switch

Fangmin Guo, Zongsheng Lai, Ziqiang Zhu, Zhong Fan, Yongfu Long, Gen Qing Yang, Xiaohong Ge, Siqin Chen, Jianfang Xie

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440198
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

A surface micromachined miniature switch has been made on silicon substrate using an electroplated gold micro-beam as the cantilevered arm, a chromium-to-gold electrical contact, and electrostatic actuation as the switching mechanism. The switch has an electrical isolation of -30dB in the 'off' state and an insertion loss of 4-7dB form 1 to 10 Ghz with a return loss of -15dB in the 'on' state. The high insertion loss has attributed to generation of parasitic current in low resistivity of the silicon substrate.

Citation Download Citation

Fangmin Guo, Zongsheng Lai, Ziqiang Zhu, Zhong Fan, Yongfu Long, Gen Qing Yang, Xiaohong Ge, Siqin Chen, and Jianfang Xie "Surface-micromachined miniature rf switch", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440198

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