Self-aligned microtool and electrochemical discharge machining (ECDM) for ceramic materials

Hyung Jun Lim; Young Mo Lim; Soo Hyun Kim; Yoon Keun Kwak

doi:10.1117/12.427083

8 May 2001 Self-aligned microtool and electrochemical discharge machining (ECDM) for ceramic materials

Hyung Jun Lim, Young Mo Lim, Soo Hyun Kim, Yoon Keun Kwak

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427083
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

Ceramic is an important material for electrical engineering fields because it has high creep, chemical, and temperature resistances. MEMS technology sometimes needs transparency and chemical resistance, so glass is often used. As the system size becomes smaller and smaller, however, it is impossible to machine such materials by conventional methods because they are hard and brittle. Some unconventional methods are suitable for non-conducting ceramic materials regardless of their properties of hardness, toughness, and brittleness. Electrochemical discharge machining (ECDM) is one of the unconventional methods for ceramic materials. However, ECDM usually requires tools fabricated by other machining. As the machining size becomes smaller, the coordinate system of the tool tip can be easily changed when we fix or replace the tools. This paper proposes a new machining system; the system has two fabrication modes. It makes a tungsten tool by electrochemical process (ECP), and then, ceramic materials are machined by ECDM with this tool. These two machining systems can be easily transformed from only one system by the regulation of the concentration of the electrolyte and the electric power controller. We illustrate and analyze some experimental results of the machining of tungsten tools and ceramic holes which have various geometric shapes.

Citation Download Citation

Hyung Jun Lim, Young Mo Lim, Soo Hyun Kim, and Yoon Keun Kwak "Self-aligned microtool and electrochemical discharge machining (ECDM) for ceramic materials", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427083

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