Paper
29 June 2001 Experimental study of the interaction of intense electron beams with metallic targets
Mircea V. Udrea, Mihaela Stoica, Mihai Ganciu, Ion G. Morjan, Anne-Marie Pointu, Hilal Goktas, Ali Alacakir, Hulya Kirkici
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Proceedings Volume 4430, ROMOPTO 2000: Sixth Conference on Optics; (2001) https://doi.org/10.1117/12.432845
Event: ROMOPTO 2000: Sixth Conference on Optics, 2000, Bucharest, Romania
Abstract
Preliminary studies regarding the interaction of intense short electron beams with different metallic targets are presented. The electron generator consists of a fast filamentary discharge in low-pressure gases. The filling gas is Helium, Argo, or Nitrogen at approximately 0.1 Torr pressure. The target might be easily changed. Also, the beam might be magnetically deflected in order to be properly directed. The interaction of the beam with different targets was investigated by means of a scanning electron microscope. The device is capable to drill holes of several tenths of microns in diameter in metallic targets.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mircea V. Udrea, Mihaela Stoica, Mihai Ganciu, Ion G. Morjan, Anne-Marie Pointu, Hilal Goktas, Ali Alacakir, and Hulya Kirkici "Experimental study of the interaction of intense electron beams with metallic targets", Proc. SPIE 4430, ROMOPTO 2000: Sixth Conference on Optics, (29 June 2001); https://doi.org/10.1117/12.432845
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KEYWORDS
Electron beams

Plasma

Materials processing

Copper

Electron microscopes

Laser drilling

Scanning electron microscopy

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