Telecentric zoom lens used in metrology applications

Stephanie Bloch; Ellis I. Betensky

doi:10.1117/12.450419

14 December 2001 Telecentric zoom lens used in metrology applications

Stephanie Bloch, Ellis I. Betensky

Proceedings Volume 4487, Zoom Lenses III; (2001) https://doi.org/10.1117/12.450419
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

A 10:1 telecentric zoom lens has been designed for metrology purposes. In addition to the specifications for high quality imaging, and less than 0.5 percent distortion throughout the range of magnification, the system has to fit within a predetermined mechanical space, and allow for coaxial illumination inserted directly into the optical axis in the space after the objective lens. This combination of specifications eliminates the possibility of using a conventional zoom lens type, primarily because the entrance pupil requirement would necessarily place the aperture stop where both size and aberrations could not be controlled. The design described includes a reimaging relay lens between the collimating objective and the zoom lens. The use of this reimaging relay lens allows for full correction of all of the aberrations, including distortion, and satisfies the mechanical requirements because the entrance pupil position for the zooming groups can be nearly ideally located. Because the coaxial illumination is a source of unwanted surface reflections from the objective lens, the objective lens must have a minimum number of air-glass surfaces. A cemented triplet including an aspherical surface satisfies this requirement.

Citation Download Citation

Stephanie Bloch and Ellis I. Betensky "Telecentric zoom lens used in metrology applications", Proc. SPIE 4487, Zoom Lenses III, (14 December 2001); https://doi.org/10.1117/12.450419

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