Characterization of high-isolation rf capacitive microswitches

Chee How Wong; M. J. Tan; J.-M. Huang; Kim Miao Liew; Ai Qun Liu

doi:10.1117/12.445259

18 October 2001 Characterization of high-isolation rf capacitive microswitches

Chee How Wong, M. J. Tan, J.-M. Huang, Kim Miao Liew, Ai Qun Liu

Proceedings Volume 4586, Wireless and Mobile Communications; (2001) https://doi.org/10.1117/12.445259
Event: Asia-Pacific Optical and Wireless Communications Conference and Exhibit, 2001, Beijing, China

Abstract

With the recent growth of microelectromechanical systems (MEMS), RF capacitive microswitches are becoming popular. As such there is a need to accurately characterize the performance of the RF capacitive microswitches. To realize this goal, the paper proposes both electrical and static mechanical models to precisely extract the performance parameters of the RF capacitive microswitches. The electrical model proposed in this paper provides a means to represent the RF capacitive microswitches for use to determine the resistance, capacitance, and inductance. The static mechanical model predicts the effective stiffness constant and the pull-in voltage. Deformation of the bridge and its contact behavior with the dielectric layer are also precisely analyzed using Finite Element Method. Finally this paper discusses the fabrication of the RF capacitive microswitches.

Citation Download Citation

Chee How Wong, M. J. Tan, J.-M. Huang, Kim Miao Liew, and Ai Qun Liu "Characterization of high-isolation rf capacitive microswitches", Proc. SPIE 4586, Wireless and Mobile Communications, (18 October 2001); https://doi.org/10.1117/12.445259

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available