Electrical analogies applied on a volumetric micropump: highlights of its fluidic resonant frequency

Olivier Francais; Samir Bendib

doi:10.1117/12.448860

19 November 2001 Electrical analogies applied on a volumetric micropump: highlights of its fluidic resonant frequency

Olivier Francais, Samir Bendib

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448860
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

This paper deals with a simple way for optimising the design of a valve-less micropump. The method is based on electric analogies. The micropump is compared to an electrical circuit similar to a RLC circuit. By this way, the fluidic resonant frequency of the micropump can be evaluated despite a non-linear working due to the used of micro-valve. The results are applied on the design of an electrostatic micropump with a specific electrode shape in order to control the micropump resonant frequency. In order to validate the modelling, a prototype of electrostatic micropump is realised. The micropump is composed of three different wafers associated by bonding techniques.

Citation Download Citation

Olivier Francais and Samir Bendib "Electrical analogies applied on a volumetric micropump: highlights of its fluidic resonant frequency", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448860

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available