Modeling of electromechanical forces in electrostatic microrelay with elastically deformed anchor

Georgy I. Efremov; Nikolay Ivanovich Mukhurov; Alexander Khodin

doi:10.1117/12.448856

19 November 2001 Modeling of electromechanical forces in electrostatic microrelay with elastically deformed anchor

Georgy I. Efremov, Nikolay Ivanovich Mukhurov, Alexander Khodin

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448856
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Electrostatic micro-relays with elastically deformed anchor (ESRE) enable to lower operation voltage due to more efficient use of electrostatic and mechanical forces interaction peculiarities. It contains the anchor with movable electrode of plate shape fixed between elastic cantilever holders with force exceeding a critical one. According to stability theory, the sagged anchor gains sinusoid-like shape with a sag equal to inter-electrode gap and directed out of immovable electrode plane. The performed calculations of ESRE have given detailed information in numerical and graphical form on interaction of electrostatic forces and mechanical forces during the switch-on process of micro-relays with various technical parameters.

Citation Download Citation

Georgy I. Efremov, Nikolay Ivanovich Mukhurov, and Alexander Khodin "Modeling of electromechanical forces in electrostatic microrelay with elastically deformed anchor", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448856

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