Novel testing scheme for selection of capacitive fingerprint sensor LSIs

Toshishige Shimamura; Hiroki Morimura; Hideyuki Unno; Koji Fujii; Satoshi Shigematsu; Katsuyuki Machida; Hakaru Kyuragi

doi:10.1117/12.448833

19 November 2001 Novel testing scheme for selection of capacitive fingerprint sensor LSIs

Toshishige Shimamura, Hiroki Morimura, Hideyuki Unno, Koji Fujii, Satoshi Shigematsu, Katsuyuki Machida, Hakaru Kyuragi

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448833
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

We propose a novel testing scheme to select good chip of capacitive fingerprint sensor LSIs. Conventional testing uses actual finger touching. For mass production, accuracy, high speed, and low cost are needed in testing. To check the sensor LSI at the wafer level using an LSI tester, we add a self-testing function to each pixel in the sensor LSI. The pixel-self-check extracts error pixels whose output is abnormally fixed. These pixels degrade the fingerprint image. A fingerprint sensor LSI with the self-testing function was fabricated using the 0.5-micrometers CMOS process/sensor process. It demonstrates that the pixel-self-check extracts error pixels accurately. The proposed testing scheme enables the selection of good chips at the wafer level without finger touching.

Citation Download Citation

Toshishige Shimamura, Hiroki Morimura, Hideyuki Unno, Koji Fujii, Satoshi Shigematsu, Katsuyuki Machida, and Hakaru Kyuragi "Novel testing scheme for selection of capacitive fingerprint sensor LSIs", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448833

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