Electrostatic driven self-aligned optical switch

Tie Li; Ming Xiang; Yuelin Wang

doi:10.1117/12.445699

16 October 2001 Electrostatic driven self-aligned optical switch

Tie Li, Ming Xiang, Yuelin Wang

Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445699
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Low-cost optical switch is one of the most important components for fiber-based local area networks. In this paper electrostatic driven self-aligned optical switch was developed for the application in optical networks. A convenient wet etching by KOH solution was used to fabricate the structure in (100) silicon wafer in the optical switch. The cantilever, vertical mirror and V-grooves were formed in the bulk silicon directly, which makes the batch process and assembly simpler and more operable. A displacement of 30 microns of the mirror was achieved by the electrostatic force between the silicon block and the aluminum pad. An obvious advantage of the electrostatic driven way is that the operation has no power consumption. Operating frequency of 200 Hz was accepted as the working frequency, which indicated that the switching time can be less than 5 ms. Coupling alignment demonstrated that the insertion losses can be less than 2 dB in the ON-OFF positions.

Citation Download Citation

Tie Li, Ming Xiang, and Yuelin Wang "Electrostatic driven self-aligned optical switch", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445699

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