Photodiodes of CVD diamond films

Wanlu Wang; Kejun Liao; Chunyang Kong; L. Fang

doi:10.1117/12.445703

16 October 2001 Photodiodes of CVD diamond films

Wanlu Wang, Kejun Liao, Chunyang Kong, L. Fang

Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445703
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

The diamond-based photodetectors were investigated. The diamond films were synthesized by microwave plasma assisted chemical vapor deposition. The films were characterized by scanning electron microscopy and Raman spectroscopy etc. The photodiode structures were fabricated on the free standing diamond films. The experimental results showed that the devices exhibited a strong UV photoresponse. It was found that the structures of the diamond films have a significant effect on the performance of the devices. The photoconductive gain of heteroepitaxial diamond films was greater than that of polycrystalline diamond films.

Citation Download Citation

Wanlu Wang, Kejun Liao, Chunyang Kong, and L. Fang "Photodiodes of CVD diamond films", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445703

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