Glass micromachining using the VUV F2 laser

Peter E. Dyer; Saher M. Maswadi; Howard V. Snelling; Christopher D. Walton

doi:10.1117/12.470626

18 June 2002 Glass micromachining using the VUV F₂ laser

Peter E. Dyer, Saher M. Maswadi, Howard V. Snelling, Christopher D. Walton

Proceedings Volume 4637, Photon Processing in Microelectronics and Photonics; (2002) https://doi.org/10.1117/12.470626
Event: High-Power Lasers and Applications, 2002, San Jose, California, United States

Abstract

Theoretical and experimental studies of the surface quality in 157 nm F₂ laser-ablated glasses are reported. Limitations set by statistical fluctuations in the multi- mode beam and by stationary beam non-uniformity are explored together with materials issues such as laser-induced surface cracking. Experimental work on ablating polymethyl methacrylate, used as a low threshold medium for recording of the VUV beam, and soda lime glass are described. Use is made of the probe beam deflection technique to determine ablation thresholds, and a variety of methods adopted for characterizing and assessing the quality of ablated surfaces e.g. scanning-electron microscopy, mechanical and optical interference profiling and atomic force microscopy. Preliminary roughness measurements are compared with theoretical expectations and the implication for glass micromachining with the F₂ laser discussed.

Citation Download Citation

Peter E. Dyer, Saher M. Maswadi, Howard V. Snelling, and Christopher D. Walton "Glass micromachining using the VUV F₂ laser", Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); https://doi.org/10.1117/12.470626

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available