Paper
1 July 2002 Laser plasma radiation sources based on a laser-irradiated gas puff target for x-ray and EUV lithography technologies
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Abstract
In this paper laser plasma radiation sources for x-ray and EUV lithography technologies are proposed. The sources are based on a recently developed double-stream gas puff target formed by pulsed injection of high-Z gas into a hollow stream of low-Z gas by using the double-nozzle setup. Strong x-ray and EUV production from the laser-irradiated double- stream gas puff target has been demonstrated. Characterization measurements of the source performed using a Nd:glass laser are presented and discussed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Rafal Rakowski, and Miroslaw Szczurek "Laser plasma radiation sources based on a laser-irradiated gas puff target for x-ray and EUV lithography technologies", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472337
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Cited by 2 scholarly publications and 3 patents.
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KEYWORDS
Extreme ultraviolet

X-rays

Plasma

X-ray lithography

Gas lasers

Extreme ultraviolet lithography

Laser irradiation

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