Quantitative description of phenolic polymer dissolution using the concept of gel layer: II. base cation size effect

Joon Yeon Cho; Se-Jin Choi

doi:10.1117/12.474164

24 July 2002 Quantitative description of phenolic polymer dissolution using the concept of gel layer: II. base cation size effect

Joon Yeon Cho, Se-Jin Choi

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Proceedings Volume 4690, Advances in Resist Technology and Processing XIX; (2002) https://doi.org/10.1117/12.474164
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

The phenolic polymer is assumed to be transferred, via intermediate gel state, from the resin to the developer solution. A mechanism for the development of phenolic polymer is proposed to derive a development rate equation considering gel layer formation. In the previous paper, new model using the concept of gel layer made it possible to provide a theoretical interpretation for experimental data of dissolution behavior, for example the dependence of the dissolution rate of phenolic polymer on the aqueous base concentration and molecular weight of resin. Following the previous paper, the dependence of the dissolution rate on the size of the base cation can be explained by taking the diffusion of base through the gel layer into account.

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Joon Yeon Cho and Se-Jin Choi "Quantitative description of phenolic polymer dissolution using the concept of gel layer: II. base cation size effect", Proc. SPIE 4690, Advances in Resist Technology and Processing XIX, (24 July 2002); https://doi.org/10.1117/12.474164

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