Bistable shape memory thin film actuators

Tobias Sterzl; Bernhard Winzek; Martina Mennicken; Rene Nagelsdiek; Helmut Keul; Hartwig Hoecker; Eckhard Quandt

doi:10.1117/12.484696

13 August 2003 Bistable shape memory thin film actuators

Tobias Sterzl, Bernhard Winzek, Martina Mennicken, Rene Nagelsdiek, Helmut Keul, Hartwig Hoecker, Eckhard Quandt

Proceedings Volume 5053, Smart Structures and Materials 2003: Active Materials: Behavior and Mechanics; (2003) https://doi.org/10.1117/12.484696
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

Shape memory alloys (SMA) are able to provide high work output when they undergo the martensitic transformation. Therefore, they present a favorable actuation mechanism for microsystems, e.g. for microvalves, switches or microgrippers. Sputter deposited thin SMA films are already in use as free-standing films or as composites in combination with a substrate. In the case of a composite, the substrate works as a bias spring and enables the SMA actuator to show a two way behavior. To enlarge the potentialities of shape memory based actuators a bistable principle is presented. This is realized by the combination with a polymer exhibiting a glass transition temperature (T_g) between the hysteresis loop of the shape memory composite. The fabrication of this composite is described with a special emphasis on the development of suitable polymer samples.

Citation Download Citation

Tobias Sterzl, Bernhard Winzek, Martina Mennicken, Rene Nagelsdiek, Helmut Keul, Hartwig Hoecker, and Eckhard Quandt "Bistable shape memory thin film actuators", Proc. SPIE 5053, Smart Structures and Materials 2003: Active Materials: Behavior and Mechanics, (13 August 2003); https://doi.org/10.1117/12.484696

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available