Paper
12 December 2003 Symmetric color separation gratings
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Abstract
We describe a new kind of symmetric color separation grating (SCSG), which can be applied to separate the frequency-tripling (3ω)light from the basic (1ω) and frequency-doubling (2ω)lights. The profile of the proposed SCSG is a three-level symmetric structure in one period, thus it is easy to fabricate it with the much improved tolerance of mask misalignment without the decrese of the efficiency of the frequency-tripling light. We have analyzed the principles of the SCSGs by employing the scalar diffraction theory and fabricated them experimentally by means of binary optics technology. The theoretical and experimental results demonstrated that the proposed SCSGs can be made in a comparatively easy way for the symmetric structure that can effectively avoid the effect of the fabrication error due to mask misalignment, thus higher manufacturing yield and lower cost can be achieved.
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Changhe Zhou, Yanyan Zhang, Peng Xi, Enwen Dai, Xuming Wu, and Liren Liu "Symmetric color separation gratings", Proc. SPIE 5201, Photonic Devices and Algorithms for Computing V, (12 December 2003); https://doi.org/10.1117/12.504122
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KEYWORDS
Diffraction

Diffraction gratings

Optical design

Photomasks

Manufacturing

Optical alignment

Tolerancing

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