Micromachined vertical cavities and hollow optical waveguides for widely tunable devices

Fumio Koyama

doi:10.1117/12.510879

14 August 2003 Micromachined vertical cavities and hollow optical waveguides for widely tunable devices

Fumio Koyama

Proceedings Volume 5246, Active and Passive Optical Components for WDM Communications III; (2003) https://doi.org/10.1117/12.510879
Event: ITCom 2003, 2003, Orlando, Florida, United States

Abstract

We present the design and fabrication of micromachined vertical cavity filters with stress control, which give us novel functions including temperature insensitive operation, thermal wavelength tuning, wavelength trimming and 2-D multi-wavelength integration. The temperature dependence could be freely controlled either for temperature operations or for wide wavelength tuning. In addition, we propose the use of a hollow waveguide in which light can be confined in air for realizing temperature-insensitive waveguide devices. We present various unique features in hollow waveguides and the combination with microelectro-mechanical system (MEMS) gives us novel widely tunable waveguide devices.

Citation Download Citation

Fumio Koyama "Micromachined vertical cavities and hollow optical waveguides for widely tunable devices", Proc. SPIE 5246, Active and Passive Optical Components for WDM Communications III, (14 August 2003); https://doi.org/10.1117/12.510879

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
12 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Hollow waveguides

Wavelength tuning

Waveguides

Tunable filters

Electronic filtering

Gallium arsenide

Microelectromechanical systems

Show All Keywords

Keywords/Phrases

Search In:

Publication Years