Design and analysis of multidegrees of freedom micromirror for triangular wave scanning

Izhak Bucher; Gal Avivi; Marko Velger

doi:10.1117/12.538376

26 July 2004 Design and analysis of multidegrees of freedom micromirror for triangular wave scanning

Izhak Bucher, Gal Avivi, Marko Velger

Proceedings Volume 5390, Smart Structures and Materials 2004: Smart Structures and Integrated Systems; (2004) https://doi.org/10.1117/12.538376
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

Traditionally, miniature scanning mirrors with which raster-scan displays are designed, oscillate sinusoidally while being operated in resonance. The operation in resonance gives rise to large vibration amplitudes under a small driving force/torque and can thus be realized in MEMS scale to oscillate at 15,000 per second and beyond. Unfortunately, sinusoidal scanning creates images with highly non-uniform intensity levels. It was therefore suggested to create a resonating mirror that performs a near triangular-wave periodic motion. Presented in this paper is a closed-form synthesis procedure with which a suitable multi degrees of freedom scanning mirror can be realized. It is shown that a special topology can be used to generate many periodic oscillatory motions under low operating forces. Specifically, a large scale electromagnetically driven system and a MEMS mirror have been designed and built to demonstrate the applicability of this approach. It is shown that the necessary excitation voltage, in the electrostatically driven MEMS mirror, can be reduced from over 1000 Volt into a more realistic 40 Volt range.

Citation Download Citation

Izhak Bucher, Gal Avivi, and Marko Velger "Design and analysis of multidegrees of freedom micromirror for triangular wave scanning", Proc. SPIE 5390, Smart Structures and Materials 2004: Smart Structures and Integrated Systems, (26 July 2004); https://doi.org/10.1117/12.538376

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