High-speed MEMS-OSA and its application to fiber sensors

Yoshifumi Takahashi

doi:10.1117/12.566512

9 June 2004 High-speed MEMS-OSA and its application to fiber sensors

Yoshifumi Takahashi

Proceedings Volume 5502, Second European Workshop on Optical Fibre Sensors; (2004) https://doi.org/10.1117/12.566512
Event: Second European Workshop on Optical Fibre Sensors, 2004, Santander, Spain

Abstract

We developed a miniature and high-speed optical spectrum analyzer (OSA) using Micro-Electro-Mechanical Systems (MEMS) technology. It consists of an engine, driving circuit, A/D converter, and PC. It has a wavelength accuracy of 10 pm, scan rate of 1.3 ms, and dynamic range of 33 dB. The heart of the MEMS-OSA is the MEMS scanning mirror (12 x 2 mm) that measures the spectrum continuously and rapidly. The scanning mirror is actuated by electrostatic force derived from electrodes integrated in the mirror. The driving voltage is about 200 V. This paper reviews the principal of the MEMS-OSA, design, performance, and application in a Fiber Bragg Grating (FBG) distortion sensor. This OSA permits measurement of applied distortion with a scan rate of 1.3 ms and an accuracy of ±2 μ Strain. It can measure distortion up to about 100 Hz, like the speed of an earthquake.

Citation Download Citation

Yoshifumi Takahashi "High-speed MEMS-OSA and its application to fiber sensors", Proc. SPIE 5502, Second European Workshop on Optical Fibre Sensors, (9 June 2004); https://doi.org/10.1117/12.566512

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